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Bahubalindruni, P.a, Tavares De Oliveira Barquinha Martins Fortunato V. G. a P. "High-gain amplifier with n-type transistors." 2013 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2013. 2013. Abstract

A high-gain amplifier topology, with all single n-type enhancement transistors, is proposed in this paper. This type of circuits are essential in transparent TFT technologies, such as GIZO and ZnO that lack complementary type transistor. All circuits were simulated using BSIM3V3 model of a 0.35 μm CMOS technology, due to the absence of a complete electrical model for the TFTs. Results reveal that the proposed circuit promise more gain, lower power consumption and higher bandwidth than the existing solutions under identical bias conditions. © 2013 IEEE.

Bahubalindruni, P.a, Tavares Barquinha Martins Fortunato V. G. a P. "High-gain topologies for transparent electronics." IEEE EuroCon 2013. 2013. 2041-2046. Abstract

Transparent TFT technologies, with amorphous semiconductor oxides are lacking a complementary type transistor. This represents a real challenge, when the design of high-gain amplifiers are considered, without resorting to passive resistive elements. However, some solutions do exist to overcome the lack of a p-type transistor. This paper then presents a comparison analysis of two high-gain single-stage amplifier topologies using only n-type enhancement transistors. In these circuits, high gain is achieved using positive feedback for the load impedance. The comparison is carried out in terms of bandwidth, power consumption and complexity under identical bias conditions. Further, the same load impedance is used to develop a novel high-gain multiplier. All the circuits are simulated using a 0.35 μm CMOS technology, as it is easy to test the reliability of the methods, since CMOS transistors have trustworthy models. © 2013 IEEE.

Parthiban, S.a, Ramamurthi Elangovan Martins Fortunato Ganesan K. a E. b. "High-mobility molybdenum doped indium oxide thin films prepared by spray pyrolysis technique." Materials Letters. 62 (2008): 3217-3219. AbstractWebsite

Molybdenum doped indium oxide (IMO) thin films were deposited on the glass substrates preheated to 450 °C by spray pyrolysis technique. The Mo doping was varied between 0 and 2.0 at.%. The films were characterized by their structural, electrical and optical properties. The films are confirmed to be cubic bixbyite In2O3 with a strongest orientation along (222) plane, which is shifted to (400) plane for the increase in Mo doping to 1.25 and 2 at.%. The film deposited with 0.5 at.% Mo doping shows high mobility of 76.9 cm2V- 1s- 1 , resistivity of 1.8 × 10- 3 Ω-cm and high carrier concentration of 4.6 × 1019 cm- 3 with 81.3% transmittance in the visible range between 500 and 800 nm. Further, the transparency extents well into the near-IR range. © 2008 Elsevier B.V. All rights reserved.

and Ao Liu, Guoxia Liu, Huihui Zhu Byoungchul Shin Elvira Fortunato Rodrigo Martins Fukai Shan. "High-mobility p-type NiOx thin-film transistors processed at low temperatures with Al2O3 high-k dielectric." Journal of Materials Chemistry C. 4 (2016): 9438-9444. AbstractWebsite

Although there are a few research studies on solution-processed p-channel oxide thin-film transistors (TFTs), the strict fabrication conditions and the poor electrical properties have limited their applications in low-power complementary metal oxide semiconductor (CMOS) electronics. Here, the application of the polyol reduction method for processing p-type CuxO and NiOx channel layers and their implementation in TFT devices are reported. The optimized CuxO and NiOx TFTs were achieved at low annealing temperatures (∼300 °C) and exhibited decent electrical properties. Encouraged by the inspiring results obtained on SiO2/Si substrates, the TFT performance was further optimized by device engineering, employing high-k AlOx as the gate dielectric. The fully solution-processed NiOx/AlOx TFT could be operated at a low voltage of 3.5 V and exhibits a high hole mobility of around 25 cm2 V-1 s-1. Our work demonstrates the ability to grow high-quality p-type oxide films and devices via the polyol reduction method over large area substrates while at the same time it provides guidelines for further p-type oxide material and device improvements. © The Royal Society of Chemistry 2016.

Fortunato, E., Correia Barquinha Pereira Goncalves Martins N. P. L. "High-performance flexible hybrid field-effect transistors based on cellulose fiber paper." IEEE Electron Device Letters. 29 (2008): 988-990. AbstractWebsite

In this letter, we report for the first time the use of a sheet of cellulose-fiber-based paper as the dielectric layer used in oxide-based semiconductor thin-film field-effect transistors (FETs). In this new approach, we are using the cellulose-fiber-based paper in an "interstrate"structure since the device is built on both sides of the cellulose sheet. Such hybrid FETs present excellent operating characteristics such as high channel saturation mobility (> 30 cm2Vs), drain-source current on/off modulation ratio of approximately 104, near-zero threshold voltage, enhancement n-type operation, and subthreshold gate voltage swing of 0.8 V/decade. The cellulose-fiber-based paper FETs' characteristics have been measured in air ambient conditions and present good stability, after two months of being processed. The obtained results outpace those of amorphous Si thin-film transistors (TFTs) and rival with the same oxide-based TFTs produced on either glass or crystalline silicon substrates. The compatibility of these devices with large-scale/large-area deposition techniques and low-cost substrates as well as their very low operating bias delineates this as a promising approach to attain high-performance disposable electronics like paper displays, smart labels, smart packaging, RFID, and point-of-care systems for self-analysis in bioapplications, among others. © 2008 IEEE.

Martins, R., Maçarico Ferreira Nunes Bicho Fortunato A. I. R. "Highly conductive and highly transparent n-type microcrystalline silicon thin films." Thin Solid Films. 303 (1997): 47-52. AbstractWebsite

The aim of this paper is to present data on the dependence of the electro-optical characteristics and structure of n-type microcrystalline silicon films on the r.f. power used during the deposition of films produced by the plasma-enhanced chemical vapour deposition technique. The interest of these films arise from the fact that they combine some electro-optical advantages of amorphous (wide optical gap) and crystalline materials (electronic behaviour), highly interesting in the production of a wide variety of optoelectronic devices such as solar cells and thin film transistors. In this paper, microcrystalline n-type films presenting simultaneously optical gaps of about 2.3 eV, dark conductivity of 6.5 S cm-1 and Hall mobility of about 0.86 cm2 V-1 s-1 will be reported, the highest combined values for n-type microcrystalline silicon films, as far as we know. © 1997 Elsevier Science S.A.

c Deuermeier, J.a b, Wardenga Morasch Siol Nandy Calmeiro Martins Klein Fortunato H. F. b J. "Highly conductive grain boundaries in copper oxide thin films." Journal of Applied Physics. 119 (2016). AbstractWebsite

High conductivity in the off-state and low field-effect mobility compared to bulk properties is widely observed in the p-type thin-film transistors of Cu2O, especially when processed at moderate temperature. This work presents results from in situ conductance measurements at thicknesses from sub-nm to around 250 nm with parallel X-ray photoelectron spectroscopy. An enhanced conductivity at low thickness is explained by the occurrence of Cu(II), which is segregated in the grain boundary and locally causes a conductivity similar to CuO, although the surface of the thick film has Cu2O stoichiometry. Since grains grow with an increasing film thickness, the effect of an apparent oxygen excess is most pronounced in vicinity to the substrate interface. Electrical properties of Cu2O grains are at least partially short-circuited by this effect. The study focuses on properties inherent to copper oxide, although interface effects cannot be ruled out. This non-destructive, bottom-up analysis reveals phenomena which are commonly not observable after device fabrication, but clearly dominate electrical properties of polycrystalline thin films. © 2016 Author(s).

b b b b Filonovich, S.A.a, Águas Bernacka-Wojcik Gaspar Vilarigues Silva Fortunato Martins H. a I. b. "Highly conductive p-type nanocrystalline silicon films deposited by RF-PECVD using silane and trimethylboron mixtures at high pressure." Vacuum. 83 (2009): 1253-1256. AbstractWebsite

In this paper we present a study of boron-doped nc-Si:H films prepared by PECVD at high deposition pressure (≥4 mbar), high plasma power and low substrate temperature (≤200 °C) using trimethylboron (TMB) as a dopant gas. The influence of deposition parameters on electrical, structural and optical properties is investigated. We determine the deposition conditions that lead to the formation of p-type nanocrystalline silicon thin films with very high crystallinity, high value of dark conductivity (>7 (Ω cm)-1) and high optical band gap (≥1.7 eV). Modeling of ellipsometry spectra reveals that the film growth mechanism should proceed through a sub-surface layer mechanism that leads to silicon crystallization. The obtained films are very good candidates for application in amorphous and nanocrystalline silicon solar cells as a p-type window layer. © 2009 Elsevier Ltd. All rights reserved.

Fortunato, E., Nunes Marques Costa Águas Ferreira Costa Martins P. A. D. "Highly conductive/transparent ZnO:Al thin films deposited at room temperature by rf magnetron sputtering." Key Engineering Materials. 230-232 (2002): 571-574. AbstractWebsite

Transparent conducting ZnO:Al thin films have been deposited on polyester (Mylar type D, 100 μm thickness) substrates at room temperature by r.f. magnetron sputtering. The structural, optical and electrical properties of the deposited films have been studied. The samples are polycrystalline with a hexagonal wurtzite structure and a strong crystallographic c-axis orientation (002) perpendicular to the substrate surface. As deposited ZnO:Al thin films have an 85% transmittance in the visible and infra-red region and a resistivity as low as 3.6×10-2 Ωcm. The obtained results are comparable to those ones obtained on glass substrates, opening a new field for low cost, light weight, small volume, flexible and unbreakable large area optoelectronic devices.

Bender, M.a, Fortunato Nunes Ferreira Marques Martins Katsarakis Cimalla Kiriakidis E. b P. b. "Highly sensitive ZnO ozone detectors at room temperature." Japanese Journal of Applied Physics, Part 2: Letters. 42 (2003): L435-L437. AbstractWebsite

In this letter we compare the room temperature ozone sensing properties of intrinsic zinc oxide (ZnO) thin films deposited by spray pyrolysis, dc and r.f. magnetron sputtering. Their sensor response exceeds 8 orders of magnitude when the film structure is constituted by nanocrystallites. These preliminary results clearly demonstrate that the films could be potentially used for ozone detection at room temperature.

Fortunato, E., Raniero Siva Gonçalves Pimentel Barquinha Águas Pereira Gonçalves Ferreira Elangovan Martins L. L. A. "Highly stable transparent and conducting gallium-doped zinc oxide thin films for photovoltaic applications." Solar Energy Materials and Solar Cells. 92 (2008): 1605-1610. AbstractWebsite

Transparent and highly conducting gallium zinc oxide (GZO) films were successfully deposited by RF sputtering at room temperature. A lowest resistivity of∼2.8 × 10-4 ωcm was achieved for a film thickness of 1100nm (sheet resistance ∼2.5ω/□), with a Hall mobility of 18cm2/Vs and a carrier concentration of 1.3 × 1021 cm-3. The films are polycrystalline with a hexagonal structure having a strong crystallographic c-axis orientation. A linear dependence between the mobility and the crystallite size was obtained. The films are highly transparent (between 80% and 90% including the glass substrate) in the visible spectra with a refractive index of about 2, very similar to the value reported for the bulk material. These films were applied to single glass/TCO/pin hydrogenated amorphous silicon solar cells as front layer contact, leading to solar cells with efficiencies of about 9.52%. With the optimized deposition conditions, GZO films were also deposited on polymer (PEN) substrates and the obtained results are discussed. © 2008 Elsevier B.V. All rights reserved.

Sanematsu, M.S.a, Pereyra Andrade Martins I. a A. M. "Highly uniform large-area a-Si:H films." Solar Cells. 14 (1985): 281-287. AbstractWebsite

A double-chamber system was used to deposit large-area hydrogenated amorphous silicon films for photovoltaic applications. The electro-optical characterisation of films of area 400 cm2 deposited on glass substrates is described in this paper. The deposition rate of the films is dependent on the r.f. power delivered, the substrate bias and the partial pressure of the reactive gas. The film thickness was observed to have a uniformity of better than 0.5%. The best film quality was obtained for a deposition rate of about 1.5 Å s-1. The optical gap, activation energy, photosensitivity, density of gap states and hydrogen content were determined. © 1985.

b c b c b c Liu, A.a b c, Liu Zhu Shin Fortunato Martins Shan G. a H. a. "Hole mobility modulation of solution-processed nickel oxide thin-film transistor based on high-k dielectric." Applied Physics Letters. 108 (2016). AbstractWebsite

Solution-processed p-type oxide semiconductors have recently attracted increasing interests for the applications in low-cost optoelectronic devices and low-power consumption complementary metal-oxide-semiconductor circuits. In this work, p-type nickel oxide (NiOx) thin films were prepared using low-temperature solution process and integrated as the channel layer in thin-film transistors (TFTs). The electrical properties of NiOx TFTs, together with the characteristics of NiOx thin films, were systematically investigated as a function of annealing temperature. By introducing aqueous high-k aluminum oxide (Al2O3) gate dielectric, the electrical performance of NiOx TFT was improved significantly compared with those based on SiO2 dielectric. Particularly, the hole mobility was found to be 60 times enhancement, quantitatively from 0.07 to 4.4 cm2/V s, which is mainly beneficial from the high areal capacitance of the Al2O3 dielectric and high-quality NiOx/Al2O3 interface. This simple solution-based method for producing p-type oxide TFTs is promising for next-generation oxide-based electronic applications. © 2016 Author(s).

Ferreira, I.a, Fortunato Martins Vilarinho E. a R. a. "Hot-wire plasma assisted chemical vapor deposition: A deposition technique to obtain silicon thin films." Journal of Applied Physics. 91 (2002): 1644-1649. AbstractWebsite

We have produced amorphous intrinsic silicon thin films by hot-wire plasma assisted chemical vapor deposition, a process that combines the traditional rf plasma and the recent hot-wire techniques. In this work we have studied the influence of hydrogen gas dilution and rf power on the surface morphology, composition, structure and electro-optical properties of these films. The results show that by using this deposition technique it is possible to obtain at moderate rf power and filament temperature, compact i-type silicon films with ημτ of the order of 10 -5cm 2V -1, without hydrogen dilution. © 2002 American Institute of Physics.

Fortunato, E., Martins R. "How materials innovations will lead to device revolution?" 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. 2015. 884-887. Abstract

Transparent electronics has gained special attention during the last few years and is today established as one of the most promising technologies for leading the next generation of flat panel display due to its excellent electronic performance. The key components are wide band gap semiconductors, where oxides of different origin play an important role, not only as passive component but also as active component, similar to what we observe in conventional semiconductors like silicon. In this paper we present the recent progress in n- and p-type oxide based thin film transistors (TFT) produced by rf magnetron sputtering and we will summarize the major milestones already achieved with this emerging and very promising technology. © 2015 IEEE.

e d Pereira, F.M.a b, Bernacka-Wojcik Ribeiro Lobato Fortunato Martins Igreja Jorge Águas Oliva I. a R. S. "Hybrid microfluidic platform for multifactorial analysis based on electrical impedance, refractometry, optical absorption and fluorescence." Micromachines. 7 (2016). AbstractWebsite

This paper describes the development of a novel microfluidic platform for multifactorial analysis integrating four label-free detection methods: electrical impedance, refractometry, optical absorption and fluorescence. We present the rationale for the design and the details of the microfabrication of this multifactorial hybrid microfluidic chip. The structure of the platform consists of a three-dimensionally patterned polydimethylsiloxane top part attached to a bottom SU-8 epoxy-based negative photoresist part, where microelectrodes and optical fibers are incorporated to enable impedance and optical analysis. As a proof of concept, the chip functions have been tested and explored, enabling a diversity of applications: (i) impedance-based identification of the size of micro beads, as well as counting and distinguishing of erythrocytes by their volume or membrane properties; (ii) simultaneous determination of the refractive index and optical absorption properties of solutions; and (iii) fluorescence-based bead counting. © 2016 by the authors.

Filonovich, S.A.a, Águas Busani Vicente Araújo Gaspar Vilarigues Leitão Fortunato Martins H. a T. a. "Hydrogen plasma treatment of very thin p-type nanocrystalline Si films grown by RF-PECVD in the presence of B(CH 3) 3." Science and Technology of Advanced Materials. 13 (2012). AbstractWebsite

We have characterized the structure and electrical properties of p-type nanocrystalline silicon films prepared by radio-frequency plasma-enhanced chemical vapor deposition and explored optimization methods of such layers for potential applications in thin-film solar cells. Particular attention was paid to the characterization of very thin (∼20nm) films. The cross-sectional morphology of the layers was studied by fitting the ellipsometry spectra using a multilayer model. The results suggest that the crystallization process in a high-pressure growth regime is mostly realized through a subsurface mechanism in the absence of the incubation layer at the substrate-film interface. Hydrogen plasma treatment of a 22-nm-thick film improved its electrical properties (conductivity increased more than ten times) owing to hydrogen insertion and Si structure rearrangements throughout the entire thickness of the film. © 2012 National Institute for Materials Science.

Águas, H., Nunes Fortunato Silva Silva Figueiredo Soares Martins P. E. R. "Hydrogenated amorphous silicon / ZnO shottky heterojunction for position sensitive detectors." Materials Research Society Symposium - Proceedings. Vol. 664. 2001. A2661-A2666. Abstract

In this work a new structure is proposed for position sensitive detectors consisting of glass/Cr/aSi:H(n+)/a-Si:H(i)/ZnO, where the ZnO forms an heterojunction with the a-Si:H(i). The results show that this structure works with success in the fabrication of linear position sensitive detectors. The devices present a good nonlinearity of ≈ 2% and a good sensitivity to the light intensity. The main advantages of this structure over the classical p-i-n are an easier to built topology and a higher yield due to a better immunity to the a-Si:H pinholes, since the ZnO does not diffuse so easily into a-Si:H as the metal does, which are the cause of frequent failure in the p-i-n devices due to short-circuits caused by the deposition of the metal over the a-Si:H. In this structure the illumination is made directly on the ZnO, so a transparent substrate is not needed and a larger range of substrates can be used.

Vieira, M., Fantoni Macarico Soares Evans Martins A. A. F. "Hydrogenated amorphous silicon speed sensor based on the flying spot technique." Materials Research Society Symposium - Proceedings. Vol. 377. 1995. 839-844. Abstract

In the past we have developed a transient technique, called the Flying Spot Technique (FST). FST allows, not only to infer the ambipolar diffusion length but also the effective lifetime of the photogenerated carriers once the light spot velocity and geometry of the structure were known. In this paper, we propose to apply this technique backwards in order to detect the path and velocity of an object that is moving in the direction of a light source. The light reflected back from the object is analyzed through a p.i.n structure being the transient transverse photovoltage dependent on the movement of the object (position and velocity). Assuming that the transport properties of the material and the geometry of the device are known and using a triangulation method we show that it is possible to map the movement of the object. Details concerning material characterization, simulation and device geometry are presented.

Vieira, Manuela, Fantoni Alessandro Macarico A.Felipe Soares Fernando Martins Rodrigo. "Hydrogenated amorphous silicon speed sensor based on the flying spot technique." Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2397. 1995. 683-694. Abstract

PIN devices based on hydrogenated amorphous silicon (a-Si:H) became fundamental elements of many different types sensors, based on either the transverse or the lateral photovoltaic effect. In the past we have developed a transient technique, called the Flying Spot Technique (FST), based on the lateral photoeffect. FST allows, not only to infer the ambipolar diffusion length but also the effective lifetime of the photogenerated carriers once the light spot velocity and geometry of the structure were known. In this paper we propose to apply this technique backwards in order to detect the path and velocity of an object that is moving in a light source direction. The light reflected back from the object is analyzed through p.i.n. structure being the transient transverse photovoltage dependent on the object movement (position and velocity). Assuming known the transport properties of the material and the geometry of the device and using a triangulation method we show that it is possible to map the object movement. Details concerning material characterization, simulation and device geometry are presented.

Hu, Z.a b c, Liao Diao Cai Zhang Fortunato Martins X. a H. a. "Hydrogenated p-type nanocrystalline silicon in amorphous silicon solar cells." Journal of Non-Crystalline Solids. 352 (2006): 1900-1903. AbstractWebsite

A wide bandgap and highly conductive p-type hydrogenated nanocrystalline silicon (nc-Si:H) window layer was prepared with a conventional RF-PECVD system under large H dilution condition, moderate power density, high pressure and low substrate temperature. The optoelectrical and structural properties of this novel material have been investigated by Raman and UV-VIS transmission spectroscopy measurements indicating that these films are composed of nanocrystallites embedded in amorphous SiHx matrix and with a widened bandgap. The observed downshift of the optical phonon Raman spectra (514.4 cm-1) from crystalline Si peak (521 cm-1) and the widening of the bandgap indicate a quantum confinement effect from the Si nanocrystallites. By using this kind of p-layer, a-Si:H solar cells on bare stainless steel foil in nip sequence have been successfully prepared with a Voc of 0.90 V, a fill factor of 0.70 and an efficiency of 9.0%, respectively. © 2006 Elsevier B.V. All rights reserved.

Ferreira, I.a, Fortunato Vilarinho Viana Ramos Alves Martins E. a P. b. "Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques." Journal of Non-Crystalline Solids. 352 (2006): 1361-1366. AbstractWebsite

Hydrogenated silicon carbon nitride (SiCN:H) thin film alloys were produced by hot wire (HWCVD), plasma assisted hot wire (PA-HWCVD) and plasma enhanced chemical vapor (PECVD) deposition techniques using a Ni buffer layer as catalyst for inducing crystallization. The silicon carbon nitride films were grown using C2H4, SiH4 and NH3 gas mixtures and a deposition temperature of 300 °C. Prior to the deposition of the SiCN:H film a hydrogen etching of 10 min was performed in order to etch the catalyst material and to facilitate the crystallization. We report the influence of each deposition process on compositional, structural and morphological properties of the films. Scanning Electron Microscope-SEM and Atomic Force Measurement-AFM images show their morphology; the chemical composition was obtained by Rutherford Backscattering Spectrometry-RBS, Elastic Recoil Detection-ERD and the structure by Infrared-IR analysis. The thickness of the catalyst material determines the growth process and whether or not islands form. The production of micro-structured SiCN:H films is also dependent on the gas pressure, gas mixture and deposition process used. © 2006 Elsevier B.V. All rights reserved.

Guimarães, L., Martins Santos Maçarico Carvalho Fortunato Vieira R. M. A. "Hydrogenated thin film silicon semiconductors produced by a two consecutive decomposition and deposition chamber system." Vacuum. 39 (1989): 789-790. AbstractWebsite

Undoped and doped hydrogenated amorphous silicon semiconductors (a-Si:H) have been produced by a two consecutive decomposition deposition chamber (TCDDC) system assisted by electromagnetic static fields. Through this technique, a spatial separation is achieved between the plasma chemistry and that of the deposition to avoid ion and electron (with high energies) bombardment on the growing surface. Besides this, the use of a static magnetic field perpendicular to the substrate will promote plasma confinement, so avoiding its contamination by residual gases adsorbed on the reactor walls. On the other hand, the use of two grids dc biased in the deposition chamber, will allow control of the main film precursors, responsible for the electro-optical and structural properties of deposited films. In this paper we shall discuss the deposition method used as well as the transport, structural and morphological properties presented by deposited films and its dependence on deposition parameters used. © 1989.

I
d c Martins, R.a, Baptista Silva Raniero Doria Franco Fortunato P. b L. a. "Identification of unamplified genomic DNA sequences using gold nanoparticle probes and a novel thin film photodetector." Journal of Non-Crystalline Solids. 354 (2008): 2580-2584. AbstractWebsite

This paper describes a novel colorimetric method for detection of nucleic acid targets in a homogeneous format with improved sensitivity by means of a system based on the combination of a tunable monochromatic light source and an amorphous/nanocrystalline silicon photodetector that detects color and light intensity changes undergone by samples/assays containing tailored gold nanoparticles probes. This new low cost, portable, fast and simple optoelectronic platform, with the possibility to be re-used, permits detection of at least 400 fentomole of specific DNA sequences without target or signal amplification and was applied to the rapid detection of human pathogens in large variety of clinical samples such as Mycobacterium tuberculosis. © 2008 Elsevier B.V. All rights reserved.

Pereira, L., Raniero Barquinha Fortunato Martins L. P. E. "Impedance study of the electrical properties of poly-Si thin film transistors." Journal of Non-Crystalline Solids. 352 (2006): 1737-1740. AbstractWebsite

The aim of this work is to study the electrical characteristics of polycrystalline silicon (poly-Si) thin film transistors (TFTs) using spectroscopic impedance technique, where the poly-Si active layer was obtained by metal induced crystallization of amorphous silicon. From the study performed a theoretical model that fitted the impedance data is proposed, in order to obtain the separate contributions of each region that constitutes the TFT namely the channel, non accumulated region and contacts. © 2006 Elsevier B.V. All rights reserved.