b b b b b b b Martins, R.a b, Carvalho Fortunato Maçarico Santos Baia Viera Guimarães N. a E. a. "
Effects of U.V. light on the transport properties of a-Si : H films during their growth."
Journal of Non-Crystalline Solids. 97-98 (1987): 1399-1402.
AbstractThe influence of U.V. light on the transport properties of a-Si : H films during its growth in a r.f. double chamber system was investigated by conductivity, optical absorption, I.R. absorption, spectral photoconductivity and X-ray diffraction measurements. It was concluded that the presence of U.V. light during the deposition process controls the way how hydrogen is incorporated in the structure as well as the impurity atoms. The microcrystalline films investigated present sharp peaks in the I.R. spectra. Both boron and phosphorus doped films show conductivities higher than 10 S cm-1 and estimated crystalline sizes of the order of 80 Å. © 1987.
Martins, R., Ferreira Carvalho Guimarães I. N. L. "
Engineering of plasma deposition systems used for producing large area a-Si:H devices."
Journal of Non-Crystalline Solids. 137-138 (1991): 757-760.
AbstractOne of the main problems in producing large area amorphous silicon devices concerns films uniformity. In this paper we present data concerning the role of reactor geometry and design and on the film performances as well as the problems related to mechanical mismatches in scaling up the reactor size. © 1991 Elsevier Science Publishers B.V. All rights reserved.