Engineering of plasma deposition systems used for producing large area a-Si:H devices
- Citation:
- Martins, R., Ferreira Carvalho Guimarães I. N. L. "Engineering of plasma deposition systems used for producing large area a-Si:H devices." Journal of Non-Crystalline Solids. 137-138 (1991): 757-760.
Abstract:
One of the main problems in producing large area amorphous silicon devices concerns films uniformity. In this paper we present data concerning the role of reactor geometry and design and on the film performances as well as the problems related to mechanical mismatches in scaling up the reactor size. © 1991 Elsevier Science Publishers B.V. All rights reserved.
Notes:
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