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Journal Article
Fortunato, E., Soares Teodoro Guimarães Mendes Águas Silva Martins F. P. N. "Characteristics of a linear array of a-Si:H thin film position sensitive detector." Thin Solid Films. 337 (1999): 222-225. AbstractWebsite

The increasing demand in automation processes in finishing techniques also calls for automatic measurement and inspection methods. These methods ought to be installed as close as possible to the production process and they ought to measure the values needed in a safe and fast way, without disturbing the process itself. Simultaneously they should be free of wear and insensitive against mechanical perturbations. This approach can be reached by proper combination of the laser triangulation technique with an array of linear position sensitive detectors, able to supply information about the surface finishing of an object. This is the aim of this paper that envisages to present experimental results of the performances exhibited by such an array constituting 128 elements. The analogue information supplied by this array is processed by an analogue/digital converter, directly coupled to the array and whose information is computer processed, concerning the recognition of patterns and the processing of information collected over the object to be inspected. © 1999 Elsevier Science S.A. All rights reserved.

Fortunato, E., Nunes Costa Brida Ferreira Martins P. D. D. "Characterization of aluminium doped zinc oxide thin films deposited on polymeric substrates." Vacuum. 64 (2002): 233-236. AbstractWebsite

We report, for the first time, results on transparent ZnO:Al thin films deposited on polyester (Mylar type D, 100 μm thickness) substrates at room temperature by magnetron sputtering. The structural, optical and electrical properties of the deposited films have been studied. The samples are polycrystalline with a hexagonal wurtzite structure and a strong crystallographic c-axis orientation (0 0 2) perpendicular to the substrate surface. The ZnO:Al thin films with 83% transmittance in the visible region and a resistivity as low as 3.6 × 10-2 Ωcm have been obtained, as deposited. The obtained results are comparable to those obtained on glass substrates, opening a new field of low cost, light weight, small volume, flexible and unbreakable large area optoelectronic devices. © 2002 Elsevier Science Ltd. All rights reserved.

Zhang, S., Pereira Hu Ranieiro Fortonato Ferreira Martins L. Z. L. "Characterization of nanocrystalline silicon carbide films." Journal of Non-Crystalline Solids. 352 (2006): 1410-1415. AbstractWebsite

Amorphous silicon carbide films were obtained by plasma enhanced chemical vapor deposition (PECVD) technique using a gas mixture of silane, methane, and hydrogen with a high excitation frequency and a high hydrogen dilution ratio. The high temperature annealing behavior of the amorphous silicon carbide films was studied by annealing at 1373 K for 1 h in nitrogen atmosphere. A very thin Au film was deposited on part of the films to investigate the metal induced crystallization effect. Well aligned nanotubes were found on the silicon carbide films covered by a thin gold layer after the high temperature annealing by atomic force microscopy. Further study is necessary to identify the nature of the nanotubes and elucidate their growth mechanism. © 2006 Elsevier B.V. All rights reserved.

Silva, L.B.a, Baptista Raniero Doria Martins Fortunato P. b L. c. "Characterization of optoelectronic platform using an amorphous/nanocrystalline silicon biosensor for the specific identification of nucleic acid sequences based on gold nanoparticle probes." Sensors and Actuators, B: Chemical. 132 (2008): 508-511. AbstractWebsite

Nanotechnology is having a positive impact on nearly every industry, and in particular in healthcare, where it is extending the limits of molecular diagnostics to the nanoscale-nanodiagnostics. Here we describe an innovative optoelectronic platform for the colorimetric detection of nucleic acids based on oligonucleotide-derivatized gold nanoparticles. The device integrates an amorphous/nanocrystalline biosensor and a light emission source with a gold nanoprobe for specific DNA detection. This low cost, fast and simple optoelectronic platform permits detection of few picomole of nucleic acid without target or signal amplification making it suitable for application in population diagnostics and in point-of-care hand-held devices. © 2007 Elsevier B.V. All rights reserved.

Zhang, S.a b, Xu Liao Martins Fortunate Zeng Hu Kong Y. a X. a. "Characterization of polymorphous silicon thin film and solar cells." Materials Science Forum. 455-456 (2004): 77-80. AbstractWebsite

Polymorphous silicon (pm-Si:H) films have been prepared by a new regime of plasma enhanced chemical vapour deposition in the region adjacent of phase transition from amorphous to microcrystalline state. Comparing to the conventional amorphous silicon (a-Si:H), the pm-Si:H has higher photoconductivity (σph), better stability, and a broader light spectral response range in the longer wavelength range. It can be found from Raman spectra that there is a notable improvement in the medium range order. There are a blue shift for the stretching mode of IR. spectra and a red shift for the wagging mode. The shifts are attributed to the variation of the microstructure. By using pm-Si:H film as intrinsic layer, a p-i-n junction solar cell was prepared with the initial efficiency of 8.51% and a stabilized efficiency of 8.01% (AM1.5, 100mw/cm2) at room temperature (T R).

d d Zhang, S.a b, Raniero Fortunato Liao Hu Ferreira Águas Ramos Alves Martins L. a E. a. "Characterization of silicon carbide thin films and their use in colour sensor." Solar Energy Materials and Solar Cells. 87 (2005): 343-348. AbstractWebsite

A series of hydrogenated amorphous silicon carbide (a-Si 1- xC x:H) films were prepared by plasma-enhanced chemical vapour deposition (PECVD) using a gas mixture of silane, methane, and hydrogen as the reactive source. The previous results show that a high excitation frequency, together with a high hydrogen dilution ratio of the reactive gases, allow an easier incorporation of the carbon atoms into the silicon-rich a-Si 1-xC x:H film, widen the valence controllability. The data show that films with optical gaps ranging from about 1.9 to 3.6 eV could be produced. In this work the influence of the hydrogen dilution ratio of the reactive gases on the a-Si 1-xC x:H film properties was investigated. The microstuctural and photoelectronic properties of the silicon carbide films were characterized by Rutherford backscattering spectrometry (RBS), elastic recoil detection analysis (ERDA), and FT-IR spectrometry. The results show that a higher hydrogen dilution ratio enhances the incorporation of silicon atoms in the amorphous carbon matrix for carbon-rich a-Si 1-xC x:H films. One pin structure was prepared by using the a-Si 1-xC x:H film as the intrinsic layer. The light spectral response shows that this structure fits the requirement for the top junction of colour sensor. © 2004 Elsevier B.V. All rights reserved.

Zhang, S., Raniero Fortunato Pereira Martins Canhola Ferreira Nedev Águas Martins L. E. L. "Characterization of silicon carbide thin films prepared by VHF-PECVD technology." Journal of Non-Crystalline Solids. 338-340 (2004): 530-533. AbstractWebsite

A series of hydrogenated amorphous silicon carbide films were prepared by plasma enhanced chemical vapor deposition (PECVD) using a gas mixture of silane, methane, and hydrogen as the reactive source and an excitation frequency of 27.12 MHz. Compared to the typical radio frequency deposition technique, the very high plasma excitation frequency increases the density of the electrons and decreases the electron temperature, which helps the dissociation of the SiH4 and CH4, and reduces the energetic ion impact on the growth surface of the thin film. Thus, dense-films with lower bulk density of states and higher growth rate are expected, as confirmed by spectroscopic ellipsometry data. Apart from that, a substantial reduction of bulk defects is achieved, allowing an improvement of the valence controllability (widening of the optical gap from about 1.9 to 3.6 eV). In this work results concerning the microstuctural and photoelectronic properties of the silicon carbide films will be discussed in detail, correlating them with the deposition process conditions used as well as with the gas phase composition of the mixtures used. © 2004 Elsevier B.V. All rights reserved.

Raniero, L., Pereira Zhang Ferreira Águas Fortunato Martins L. S. I. "Characterization of the density of states of polymorphous silicon films produced at 13.56 and 27.12 MHz using CPM and SCLC techniques." Journal of Non-Crystalline Solids. 338-340 (2004): 206-210. AbstractWebsite

The aim of this paper is to compare the density of bulk states (DOS) of polymorphous silicon (pm-Si:H) films produced by plasma enhanced chemical vapor deposition at 13.56 and 27.12 MHz using the constant photocurrent method and the space charge limited current (SCLC) technique. The data achieved revealed that the set of films produced present similar DOS. Apart from that, data concerning the correlation of the deposition conditions that lead to the production of pm-Si:H as well as their characteristics, such as the hydrogen content and how hydrogen is bonded, will be discussed, giving special emphasis to the set of mechanical stresses developed. By doing so we could get a better understanding of the nature of hydrogen bonding in pm-Si:H films as well as to determine the role of the excitation frequency on the film's performances, where films with amounts of hydrogen around 20 at.% can have DOS as low as 8 × 10 14 cm-3 with Urbach energies in the range of 41-50 meV. © 2004 Elsevier B.V. All rights reserved.

c Nunes, D.a, Calmeiro Nandy Pinto Pimentel Barquinha Carvalho Walmsley Fortunato Martins T. R. a S. "Charging effects and surface potential variations of Cu-based nanowires." Thin Solid Films. 601 (2016): 45-53. AbstractWebsite

The present work reports charging effects and surface potential variations in pure copper, cuprous oxide and cupric oxide nanowires observed by electrostatic force microscopy (EFM) and Kelvin probe force microscopy (KPFM). The copper nanowires were produced by wet synthesis, oxidation into cuprous oxide nanowires was achieved through microwave irradiation and cupric oxide nanowires were obtained via furnace annealing in atmospheric conditions. Structural characterization of the nanowires was carried out by X-ray diffraction, scanning electron microscopy, transmission electron microscopy and energy dispersive X-ray spectroscopy. During the EFM experiments the electrostatic field of the positive probe charged negatively the Cu-based nanowires, which in turn polarized the SiO2 dielectric substrate. Both the probe/nanowire capacitance as well as the substrate polarization increased with the applied bias. Cu2O and CuO nanowires behaved distinctively during the EFM measurements in accordance with their band gap energies. The work functions (WF) of the Cu-based nanowires, obtained by KPFM measurements, yielded WFCuO > WFCu > WFCu2O. © 2015 Elsevier B.V.

Wang, J.a, Elamurugu Barradas Alves Rego Gonçalves Martins Fortunato E. a N. P. "Co-doping of aluminium and gallium with nitrogen in ZnO films deposited by RF magnetron sputtering." Journal of Physics Condensed Matter. 20 (2008). AbstractWebsite

N, (N+Ga) and (N+Al) doped ZnO films were deposited on c-plane sapphire substrates by RF magnetron sputtering at room temperature. The samples were characterized by their structural, surface morphological, compositional and optical properties. The x-ray diffraction studies confirmed the co-doping of (N+Ga) and (N+Al) besides showing improvement in the crystallinity when compared with the single Ndoping. The surface of the films becomes rougher after co-doping. The x-ray photoelectron spectroscopy and Rutherford back-scattering analysis indicate that the co-doping changes the chemical states and varies the amount of nitrogen (N) in ZnO. The amount of 'N' has been greatly increased for (N+Ga) co-doping, indicating that it is the best co-doping pair for p-type ZnO. Additionally, co-doping has increased the average visible transmittance (40-650nm) and the optical band gap is shifted towards shorter wavelength. In the case of (N+Al) co-doping, the band gap becomes wider than that of undoped ZnO. © IOP Publishing Ltd.

b b b b d b b Contreras, J.a b, Martins Wojcik Filonovich Aguas Gomes Fortunato Ferreira R. a P. a. "Color sensing ability of an amorphous silicon position sensitive detector array system." Sensors and Actuators, A: Physical. 205 (2014): 26-37. AbstractWebsite

The color sensing ability of a data acquisition prototype system integrating a 32 linear array of 1D amorphous silicon position sensitive detectors (PSD) was analyzed. Besides being used to reproduce a 3D profile of highly reflective surfaces, here we show that it can also differentiate primary red, green, blue (RGB) and derived colors. This was realized by using an incident beam with a RGB color combination and adequate integration times taking into account that a color surface mostly reflects its corresponding color. A mean colorimetric error of 25.7 was obtained. Overall, we show that color detection is possible via the use of this sensor array system, composed by a simpler amorphous silicon pin junction. © 2013 Elsevier B.V. All rights reserved.

Ferreira, I., Fortunato Martins E. R. "Combining HW-CVD and PECVD techniques to produce a-Si:H films." Thin Solid Films. 427 (2003): 231-235. AbstractWebsite

Amorphous undoped a-Si:H films have been produced by hot wire plasma assisted chemical vapour deposition (HWPA-CVD), which combines the hot wire chemical vapour deposition (HW-CVD) and plasma enhanced chemical vapour deposition techniques. In this work we analyse the dissociation mechanism of the gas during the film growth in both processes with a quadrupole mass spectrometer. Besides that, the energy delivered to the gas dissociation is determined and correlated with the films properties. Thus, based on the results of the dissociated species for each deposition condition and process, we explain why the growth rate is enhanced when the filament temperature rises in HW-CVD process and why it decreases as r.f. power is enhanced in HWPA-CVD process. © 2002 Elsevier Science B.V. All rights reserved.

Moldovan, O.a, Castro-Carranza Cerdeira Estrada Barquinha Martins Fortunato Miljakovic Iñiguez A. b A. c. "A compact model and direct parameters extraction techniques For amorphous gallium-indium-zinc-oxide thin film transistors." Solid-State Electronics. 126 (2016): 81-86. AbstractWebsite

An advanced compact and analytical drain current model for the amorphous gallium indium zinc oxide (GIZO) thin film transistors (TFTs) is proposed. Its output saturation behavior is improved by introducing a new asymptotic function. All model parameters were extracted using an adapted version of the Universal Method and Extraction Procedure (UMEM) applied for the first time for GIZO devices in a simple and direct form. We demonstrate the correct behavior of the model for negative VDS, a necessity for a complete compact model. In this way we prove the symmetry of source and drain electrodes and extend the range of applications to both signs of VDS. The model, in Verilog-A code, is implemented in Electronic Design Automation (EDA) tools, such as Smart Spice, and compared with measurements of TFTs. It describes accurately the experimental characteristics in the whole range of GIZO TFTs operation, making the model suitable for the design of circuits using these types of devices. © 2016 Elsevier Ltd

Lajn, A.a, Von Wenckstern Grundmann Wagner Barquinha Fortunato Martins H. a M. a. "Comparative study of transparent rectifying contacts on semiconducting oxide single crystals and amorphous thin films." Journal of Applied Physics. 113 (2013). AbstractWebsite

We demonstrate fully transparent, highly rectifying contacts (TRC) on amorphous GaInZnO and compare them to TRC fabricated on single crystalline bulk ZnO and heteroepitaxial ZnO thin films. The contacts' transparency in the visible spectral range exceeds 70%. From numerical simulations, we conclude that thermionic emission is the dominating transport mechanism, however, for several samples with low net doping density diffusion theory must be applied. The detailed investigation of the rectification properties of the TRC using temperature-dependent current-voltage and capacitance-voltage measurements reveals that barrier inhomogeneities govern the IV-characteristics of all diodes irrespective of the sample crystallinity. Assuming a Gaussian barrier height distribution, the extracted mean barrier heights typically range between 1.1 and 1.3 V. The width of the barrier distribution correlates with the mean barrier height and ranges from 110 to 130 mV. By compiling literature data, we found that this correlation holds also true for Schottky diodes on elemental and III-V semiconductors. © 2013 American Institute of Physics.

Martins, R.a, Nathan Barros Pereira Barquinha Correia Costa Ahnood Ferreira Fortunato A. b R. a. "Complementary metal oxide semiconductor technology with and on paper." Advanced Materials. 23 (2011): 4491-4496. AbstractWebsite

A complementary metal oxide semiconductor (CMOS) device is described. The device is based on n-(In-Ga-Zn-O) and p-type (SnO x) active oxide semiconductors and uses a transparent conductive oxide (In-Zn-O) as gate electrode that sits on a flexible, recyclable paper substrate that is simultaneously the substrate and the dielectric. Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

c Almeida, P.L.a, Godinho Cidade Nunes Marques Martins Fortunato Figueirinhas M. H. a M. "Composite systems for flexible display applications from cellulose derivatives." Synthetic Metals. 127 (2002): 111-114. AbstractWebsite

In this work, we study the electro-optical behaviour of cellulose/liquid crystal-based composite systems, in particular the influence of the flexible substrates and its conductive layers in the electro-optical behaviour of these kind of cells. Four cells were made using, respectively, two different substrates (a flexible polymer (poly(ethylene terephthalate) (PET)) and a soda lime glass) and two different conductive layers (indium tin oxide (ITO) and aluminium zinc oxide (AZO)). The conductive layer (AZO) was deposited in both, flexible and rigid substrates, for the same conditions, and the same substrates coated with ITO are commercially available. The cells were prepared from solid films of hydroxypropylcellulose (HPC) (30 μm thick) cross linked with 1,4-diisocyanatobutane (BDI) (7% w/w) and the nematic liquid crystal E7 (Merck, UK). The four different substrates were electrically and morphologically characterised. We have analysed all samples by light transmission and determined the maximum transmission, contrast and Von. We show a comparison of the results obtained for both flexible and rigid cells and discuss them in terms of the proposed working mechanism for these systems. © 2002 Elsevier Science B.V. All rights reserved.

Ferreira, I., Cabrita Fortunato Martins A. E. R. "Composition and structure of silicon-carbide alloys obtained by hot wire and hot wire plasma assisted techniques." Vacuum. 64 (2002): 261-266. AbstractWebsite

In this work we present results concerning the composition and structure of intrinsic thin film silicon carbide alloys obtained by hot wire and hot wire plasma assisted techniques using ethylene as carbon gas source. The data show that by increasing the percentage of ethylene in the gas mixture from 14% to 60% the optical band gap is enhanced from 1.8 eV to 2.3 eV, for films produced by hot wire technique at a filament temperature of 2123K (1850°C). This is attributed to the increase of carbon incorporation, which was confirmed by the infrared spectra data where an increase is observed in the SiC stretching vibration mode ascribed to the peak located at around 750cm-1. On the other hand, the films produced by combining hot wire and rf plasma show a more efficient carbon incorporation. The SEM photographs of samples produced with hot wire technique reveal an amorphous structure, confirmed by micro-Raman spectroscopy data, while the samples produced with plasma assisting the process show a granular structure with grain sizes in the range of 100-200nm. © 2002 Elsevier Science Ltd. All rights reserved.

i Martins, R.a, Águas Ferreira Fortunato Raniero Roca Cabarrocas H. a I. a. "Composition, structure and optical characteristics of polymorphous silicon films deposited by PECVD at 27.12 MHz." Materials Science Forum. 455-456 (2004): 100-103. AbstractWebsite

This paper presents data concerning the composition structure and optical characteristics of polymorphous silicon films produced by plasma enhanced chemical vapour deposition at 27.12 MHz and determined respectively by infrared spectrometry, micro Raman, exodiffusion and spectroscopic ellipsometry measurements. When compared to the pm-Si:H films produced at 13.56 MHz, the films produced at 27.12 MHz present hydrogen contents in the range of 21 at%, the sharp peak ascribed to the exodifusion measurements is shifted towards high temperatures and the imaginary part of the dielectric function 〈ε2〉 is larger and shifted to high energies. Apart from that the peaks of the infrared spectra ascribed to the stretching modes shift towards high wave numbers and the half width of the micro Raman peaks shrinks, meaning that the films produced at 27.12 MHz are more compact and dense.

Martins, J.I.a, Costa Bazzaoui Gonçalves Fortunato Martins S. C. a M. "Conditions to prepare PPy/Al2O3/Al used as a solid-state capacitor from aqueous malic solutions." Journal of Power Sources. 160 (2006): 1471-1479. AbstractWebsite

The electrosynthesis of polypyrrole (PPy) has been achieved on aluminium in aqueous medium of malic acid by means of cyclic voltammetry, potentiostatic and galvanostatic techniques. Scanning electron microscopy (SEM) and X-ray microanalysis by dispersion energy spectroscopy (EDS) applying on surfaces show that the PPy coating is developed from the metal surface through the cracks of the initial Al2O3 layer. Moreover, the results reveal that the homogeneity of the film achieved increases with the time of electropolymerization. A mechanism involving the participation of the supporting electrolyte and the pyrrole (Py) in distinct active sites was proposed based on the linear sweep voltammetry. It is observed for all the applied electrochemical techniques that the pyrrole concentration has to be higher than 0.1 M to allow the polypyrrole electrodeposition in acid medium. Scanning electron microscopy, secondary electrons (SE) and backscattering electrons (BE), shows that the PPy coating obtained in galvanostatic and potentiostatic modes starts with small islands at weak applied potentials or current densities. The corrosion results in 3% NaCl medium show that the PPy coating decreases the corrosion behaviour of the aluminium. The bilayer Al2O3/PPy shows a capacitor with future applications. © 2006 Elsevier B.V. All rights reserved.

Águas, H.a, Nunes Fortunato Gordo Maneira Martins Y. b E. a. "Correlation between a-Si:H surface oxidation process and the performance of MIS structures." Thin Solid Films. 383 (2001): 185-188. AbstractWebsite

In order to correlate the MIS devices performance with different surface oxidation methods, AFM, spectroscopic ellipsometry and infrared spectroscopy measurements were performed in a-Si:H films, before and after surface oxidation, using different oxidation techniques and oxides: thermal dry (in air), wet (in H2O2) and by oxygen plasma, while MIS (metal-insulator-semiconductor) devices were characterized by I-V curves, under dark and AM1.5 illumination conditions. The a-Si:H films were grown by the PECVD technique, in a modified triode configuration reactor to allow a precise control of the ion bombardment during the film deposition. We found that the growth of a thin layer of oxide by chemical processes on the top of the a-Si:H surface can cause changes on the surface morphology that are reflected in the electrical behaviour of the devices. The oxygen plasma treatment, cause the rearrangement of the surface atoms leading to a change of their morphology and to the improvement of the electrical properties of the surface for a MIS applications.

Martins, R., Silva �?guas Cabrita Ferreira Fortunato V. H. A. "Correlation between the carbon and hydrogen contents with the gas species and the plasma impedance of silicon carbide films produced by PECVD technique." Applied Surface Science. 184 (2001): 101-106. AbstractWebsite

This paper deals with the determination of plasma impedance and ion density in r.f. plasmas using different mixtures of silane with methane or ethylene and r.f. powers. The aim is to correlate these parameters with carbon and hydrogen contents of the films produced. The data achieved show that the best carbon incorporation is achieved using ethylene gas mixtures, under low gas mixture concentration, where the substrate also sustains a low ion bombardment. The data also show that particulates in the plasma can be more easily formed in the ethylene-based processes. © 2001 Published by Elsevier Science B.V.

Lopes, A.a, Fortunato Nunes Vilarinho Martins E. a P. a. "Correlation between the microscopic and macroscopic characteristics of SnO2 thin film gas sensors." International Journal of Inorganic Materials. 3 (2001): 1349-1351. AbstractWebsite

Hall effect measurements have been used to evaluate the conduction mechanism, exhibited by tin oxide thin film gas sensors deposited by spray pyrolysis. Two experiments have been carried out: (i) Hall measurements in air and (ii) in the presence of methane (first results reported), both as a function of temperature. From the measurements performed it was possible to infer the potential barrier and its dependence with the atmosphere used. The results obtained for the carrier concentration and mobility have been analysed in the light of the oxygen diffusion mechanism at grain boundaries by using the grain boundary-trapping model. In the presence of the methane gas the electrical resistivity decreases due to the lowering of the inter-grain boundary barrier height. © 2001 Published by Elsevier Science Ltd.

G-Berasategui, E.a, Bayón Zubizarreta Barriga Barros Martins Fortunato R. a C. a. "Corrosion resistance analysis of aluminium-doped zinc oxide layers deposited by pulsed magnetron sputtering." Thin Solid Films. 594 (2015): 256-260. AbstractWebsite

In this paper an exhaustive analysis is performed on the electrochemical corrosion resistance of Al-doped ZnO (AZO) layers deposited on silicon wafers by a DC pulsed magnetron sputtering deposition technique to test layer durability. Pulse frequency of the sputtering source was varied and a detailed study of the electrochemical corrosion response of samples in the presence of a corrosive chloride media (NaCl 0.06 M) was carried out. Electrochemical impedance spectroscopy measurements were performed after reaching a stable value of the open circuit at 2 h, 192 h and 480 h intervals. Correlation of the corrosion resistance properties with the morphology, and the optical and electrical properties was tested. AZO layers with transmission values higher than 84% and resistivity of 6.54 × 10- 4 â. cm for a deposition process pressure of 3 × 10- 1 Pa, a sputtering power of 2 kW, a pulse frequency of 100 kHz, with optimum corrosion resistance properties, were obtained. © 2015 Elsevier B.V.

Gonçalves, G., Barquinha Raniero Martins Fortunato P. L. R. "Crystallization of amorphous indium zinc oxide thin films produced by radio-frequency magnetron sputtering." Thin Solid Films. 516 (2008): 1374-1376. AbstractWebsite

In this work we studied indium zinc oxide (IZO) thin films deposited by r.f. magnetron sputtering at room temperature. The films were annealed at high temperature (1100 K) in vacuum, and the oxygen exodiffusion was monitored in-situ. The results showed three main peaks, one at approximately 600 K, other at approximately 850 K and the last one at 940 K, which are probably from oxygen bonded in the film surface and in the bulk, respectively. The initial amorphous structure becomes microcrystalline, according to the X-ray diffraction. The electrical conductivity of the films decreases (about 3 orders of magnitude), after the annealing treatment. This behavior could be explained by the crystallization of the structure, which affects the transport mechanism. Apart from the changes in the material structure, a small variation was observed on the absorption coefficient. © 2007 Elsevier B.V. All rights reserved.