Correlation between a-Si:H surface oxidation process and the performance of MIS structures
- Citation:
- Águas, H.a, Nunes Fortunato Gordo Maneira Martins Y. b E. a. "Correlation between a-Si:H surface oxidation process and the performance of MIS structures." Thin Solid Films. 383 (2001): 185-188.
Abstract:
In order to correlate the MIS devices performance with different surface oxidation methods, AFM, spectroscopic ellipsometry and infrared spectroscopy measurements were performed in a-Si:H films, before and after surface oxidation, using different oxidation techniques and oxides: thermal dry (in air), wet (in H2O2) and by oxygen plasma, while MIS (metal-insulator-semiconductor) devices were characterized by I-V curves, under dark and AM1.5 illumination conditions. The a-Si:H films were grown by the PECVD technique, in a modified triode configuration reactor to allow a precise control of the ion bombardment during the film deposition. We found that the growth of a thin layer of oxide by chemical processes on the top of the a-Si:H surface can cause changes on the surface morphology that are reflected in the electrical behaviour of the devices. The oxygen plasma treatment, cause the rearrangement of the surface atoms leading to a change of their morphology and to the improvement of the electrical properties of the surface for a MIS applications.
Notes:
cited By 7
Recent Publications
