Rodrigo Martins

Microcrystalline phosphorus-doped hydrogenated silicon alloy films were deposited in a remote plasma CVD (chemical vapor deposition) system. The film properties were studied as a function of RF power density and hydrogen concentration in the reaction gas mixture. The properties of the deposited films are extremely sensitive to the RF power density in the studied range of 250 mW/cm2 to 625 mW/cm2. Very low values of electrical resistivity were obtained. For an RF power density of 500 mW/cm2, ρ = 3 × 10-2 Ω-cm, while ρ = 1.9 × 103 Ω-cm for 625 mW/cm2, indicating the predominance of the amorphous tissue over the microcrystalline phase. High doping efficiencies which can be correlated to large grain size are indicated by the very low values of the activation energy as low as 30 meV for 500 mW/cm2, that were obtained.

Experimental results on structure defects in microcrystalline (μc) n- and p-doped μc-S1-x:Cx:H films deposited on alkali-free glass substrates by spatial plasma separation1 and obtained by electron paramagnetic resonance (EPR) are presented. The technique used for subtracting the substrate effect on recorded spectra is also discussed as well as its quantification. The microscopic structure of intrinsic defects and impurity states and their role in transport mechanisms are studied and correlated with the composition of their films. These results are also related to transport properties of deposited films in order to observe the role of dopant centres, located at conduction band tails, in controlling the electrical properties. © 1989.

The influence of U.V. light on the transport properties of a-Si : H films during its growth in a r.f. double chamber system was investigated by conductivity, optical absorption, I.R. absorption, spectral photoconductivity and X-ray diffraction measurements. It was concluded that the presence of U.V. light during the deposition process controls the way how hydrogen is incorporated in the structure as well as the impurity atoms. The microcrystalline films investigated present sharp peaks in the I.R. spectra. Both boron and phosphorus doped films show conductivities higher than 10 S cm-1 and estimated crystalline sizes of the order of 80 Å. © 1987.

Doped and undoped a-Si:H and a-SiC:H films were deposited by R. F. decomposition of silane and silane/methane mixtures respectively, in a two consecutive (decomposition and deposition) chambers glow discharge capacitively coupled system. Their electro-optical properties were extensively investigated through dark conductivity, photoconductivity, spectral response, optical absorption, R. F. transmission spectra, electron spin ressonance and CxV MOS measurements.

The aim of the present work was to study the optical properties of amorphous hydrogenated silicon films produced by capacitive and inductive r.f. glow discharge in a 3%SiH4-Ar gas mixture. The effect of the application of static electric and magnetic fields during the film formation on the photoconductivity, photoactivation energy, recombination mechanisms and optical gap was thoroughly investigated. Films prepared in a capacitively or inductively coupled discharge show bias-dependent photoconductivities, which reach about 10-4 Ω-1 cm-1 for an inductive discharge with a negative bias and about 10-5 Ω-1 cm-1 for a capacitive discharge with a positive bias. The optical gap is of the order of 1.55 eV for capacitive films and is bias dependent for inductive films (1.45-1.85 eV). A superimposed magnetic field (of about 1 kG) increases the photoconductivity by one order of magnitude for both deposition methods. The optical gap is field dependent for inductive films (1.6-1.8 eV) and is about 1.6 eV for capacitive films. The main recombination mechanism at a moderate photon flux (less than 1014 cm-2 s-1) is monomolecular for all deposition conditions. The photoactivation energy lies between 0.1 and 0.2 eV for capacitive films and is about 0.1 eV for inductive films. It was also found that, by using suitable crossed electric and magnetic fields, it was possible to control the density and nature of the defect states in the films. These are correlated with the type of hydrogenated silicon species and with the amount of hydrogen incorporated into the films, which markedly influence the film properties. © 1982.

It is shown that the electronic properties of amorphous germanium (a-Ge) prepared by the glow-discharge decomposition of germane can be controlled systematically by substitutional phosphorus doping from the gas phase. Specimens with different doping levels have' been investigated by conductivity, thermoelectric power and Hall effect measurements in a temperature range between 160 and 450 K. The dependence of conductivity on doping level is qualitatively similar to that in a-Si, but the range of control is limited in a-Ge by the smaller mobility gap. Also the larger overall density of gap states in this material reduces the doping sensitivity. The above transport measurements and their temperature dependence can be interpreted in a quantitatively consistent manner- by a two-path model in which conduction takes place in the extended states and in another path through the localized states. As 111 a-Si, the photoconductivity of glow-discharge Ge can be appreciably sensitized by phosphorus doping. The μτ product deduced from such experiments on a-Ge and a-Si are compared for different preparation techniques. The data show that irrespective of the presence of hydrogen the method of deposition remains an important factor in determining the density of gap states. © 1979 Taylor & Francis Ltd.