Kholkin, A.L., Iakovlev Fortunato Martins Ferreira Shvartsman Baptista S. E. R. "
Optical and photoelectric properties of PZT films for microelectronic applications."
Key Engineering Materials. 230-232 (2002): 563-566.
AbstractPbZrxTi1-xO3 (PZT) films are currently being investigated in view of their large switching polarization and piezoelectric coefficients useful for various applications. Besides, PZT films possess large photosensitivity, which, in combination with the above listed properties, can be a base for future microelectronic applications including photostrictive actuators and optical storage devices. In this work, PZT thin films of several compositions (x=0.2 and 0.45) were deposited on Pt-coated Si and ITO/glass substrates via modified sol-gel technique. Microstructures of the films were evaluated using XRD, SEM and AFM. The optical transmission measurements on PZT films deposited on ITO/glass revealed a high transparency over 80% and a band gap of about 3.4 eV. The observed photocurrent exhibited a maximum and was attributed to band-to-band optical transitions.
Kholkin, A.L.b, Martins Águas Ferreira Silva Smirnova Costa Vilarinho Fortunato Baptista R. a H. a. "
Metal-ferroelectric thin film devices."
Journal of Non-Crystalline Solids. 299-302 (2002): 1311-1315.
AbstractFerroelectric and high dielectric permittivity films are currently being investigated in view of their use as gate dielectrics in MIS structures. Along with the suppression of tunnelling currents at small gate thickness, they provide a memory function to MIS structures, which can be used in non-volatile memory applications. In this work we report fabrication and characterization of novel metal-ferroelectric-amorphous silicon structures. The structures consist of glass/ITO substrates coated with PZT 20/80 films (sol-gel) followed by an active layer (i-a-SiC:H, deposited by plasma enhanced chemical vapor deposition (PECVD)). A strong capacitance hysteresis is observed in C-V curves in electron accumulation region (VG > 0), accompanied with a large increase in the capacitance of ferroelectric-semiconductor structures at low frequencies. Threshold voltage for electron accumulation is about 10 V being dependent on the ferroelectric polarization switching. © 2002 Elsevier Science B.V. All rights reserved.