Silicon films produced by PECVD under powder formation conditions
- Citation:
- Martins, R., Águas Silva Ferreira Cabrita Fortunato H. V. I. "Silicon films produced by PECVD under powder formation conditions." Materials Science Forum. 382 (2001): 21-28.
Abstract:
The process conditions of growing thin silicon films by plasma enhanced chemical vapour deposition (PECVD) were presented. The plasma impedance was found to monitor the powders in the PECVD systems and good quality silicon films were grown close to the plasma regime where the powders were formed. The silicon films exhibited properties which were interpreted based on a two-phase model where silicon nanostructures were embedded in a disordered network.
Notes:
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