Correlation between electrical-optical and structural properties of microcrystalline silicon N type films

Citation:
Martins, R., Macarico Ferreira Nunes Bicho Fortunato A. I. R. "Correlation between electrical-optical and structural properties of microcrystalline silicon N type films." Materials Research Society Symposium - Proceedings. Vol. 420. 1996. 807-812.

Abstract:

Wide band gap microcrystalline silicon films have aroused considerable interest since they combine some electro-optical advantages of amorphous and crystalline materials highly important to produce electro-optical devices such as TFTs and solar cells. In this paper we present results concerning the electro-optical characteristics of highly transparent and conductive n-type μc-Si based films. Here, emphasis is given to the production of n-type μc-films with optical gaps of 2.3 eV and dark conductivity's of 6.5 Scm-1.

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