Ferreira, I., Águas Pereira Fortunato Martins H. L. E. "
Properties of a-Si:H intrinsic films produced by HWPA-CVD technique."
Thin Solid Films. 451-452 (2004): 366-369.
AbstractIn this paper, we investigate the optoelectronic properties and the photodegradation of amorphous silicon films produced by the hot wire plasma assisted technique (HWPA-CVD). We observed that hydrogen dilution in the gas phase plays an important role in the time dependence of the photoconductivity, which is correlated with an enhancement of defect density. We also compare the degradation of these films with those produced by plasma enhanced and by hot wire chemical vapour deposition techniques (PECVD and HW-CVD) and we found lower time dependence for the photodegradation of the films produced by HWPA-CVD technique © 2003 Elsevier B.V. All rights reserved.
Moniz, António Resultados provisórios do exercício Delphi WorTiS (1ª fase)[Provisional results of the 1st round of Delphi WorTiS exercise]. University Library of Munich, Germany, 2004.
AbstractIn this working paper are present the main provisional results of the first round of a Delphi survey held in Portugal on the automotive sector. It was done under the WorTiS project, developed by IET – Research Centre on Enterprise and Work Innovation, and financed by the Portuguese Ministry of Science and Technology. The majority of experts consider to have an average of less knowledge in almost all the scenario topics presented. Nevertheless, we considered specially the topics where the experts considered themselves to have some knowledge. There were no “irrelevant” topics considered as such by the expert panel. There are also no topics that is not considered a need for co-operation (that happens in jus tone case). The lack of technological infra-structrures was not considered as an hindered factor for the accomplishement of any scenario. The experts panel considered no other international competence besides US, Japan or Germany in these topics. Although the members of the expert panel were not as many as needed, These situations will be taken into consideration for a second round of the Delphi survey
Pereira, L., Águas Raniero Martins Fortunate Martins H. L. R. "
Role of substrate on the growth process of polycrystalline silicon thin films by low-pressure chemical vapour deposition."
Materials Science Forum. 455-456 (2004): 112-115.
AbstractThis paper deals with the role the substrate on the structure of undoped and n-doped polycrystalline silicon (poly-Si) films produced by Low Pressure Chemical Vapour Deposition (LPCVD). The structural and electrical properties of the films deposited on glass, glass covered with molybdenum (Mo), oxidised crystalline silicon and oxidised crystalline silicon covered with Mo were analysed using X-ray diffraction and Spectroscopic Ellipsometry, dark conductivity and Hall effect measurements. Undoped poly-Si films deposited over Mo present modifications in the crystalline structure relatively to those deposited on the other substrates. The presence of Mo changes the preferential growth orientation, enhancing the Si {111} grains orientation, leading to more compact films. The electrical measurements also confirm that the films grown on Mo substrates present better characteristics. Some differences are also observed during the initial growth stages when using glass or oxidised silicon. Very thin n-doped films present a less effective doping effect when deposited on oxidised silicon than the ones deposited on glass substrates.
Águas, H.a, Raniero Pereira Viana Fortunato Martins L. a L. a. "
Role of the rf frequency on the structure and composition of polymorphous silicon films."
Journal of Non-Crystalline Solids. 338-340 (2004): 183-187.
AbstractIn this work we present results of structural composition and morphological characteristics of polymorphous silicon (pm-Si:H) films deposited by PECVD at 13.56 and 27.12 MHz. In addition, the role of the excitation frequency on the growth rate will be also analyzed. The results show that by using the 27.12 MHz excitation frequency the hydrogen dilution in the plasma needed to produce pm-Si:H can be reduced by more than 50% as well as the rf power density, leading to an increase on the growth rate to values higher than 3 Å/s. Spectroscopic ellipsometry and Raman spectroscopy show that the 27.12 MHz pm-Si:H films are more ordered than the pm-Si:H films produced at 13.56 MHz, while the infrared spectroscopy show that the SiH2 concentration in the films is strongly reduced. AFM measurements reveal that the films produced at 27.12 MHz films are more structured, presenting also higher roughness. © 2004 Elsevier B.V. All rights reserved.
Silva, A., Raniero Ferreira Águas Pereira Fortunato Martins L. E. H. "
Silicon etching in CF4/O2 and SF6 atmospheres."
Materials Science Forum. 455-456 (2004): 120-123.
AbstractThe aim of this work is to present a process able to allow a fast method to clean plasma enhanced chemical vapour deposition (PECVD) systems used to produce amorphous silicon films and their alloys, and a proper device patterning when required. In this work we propose to study CF4/O2 or SF6 as etchant gases at room temperature to perform cleaning and films patterning. The aim is to select the process that leads to a faster cleaning process without formation of residual contaminants or to anisotropic patterning of very thin layers. The influence of some plasma parameters, such as pressure (p), power (P) and flow (f) for the etchant gases used will be also analysed.