This new production technique is based on the growth of a-Si films on a reactor where gas decomposition promoted by a capacitively coupled r. f. power system takes place in a chamber separated from that where amorphous films are deposited under the action of an electromagnetic static field. Using this method, we shall reduce films contamination caused by the residual gas desorbed from reactor walls. At the same time, there is a reduction plasma ion and electron damages on the deposited films. The main species impinging upon our substrates will be mainly composed of long life radicals with high mobilities and high diffusion rates, which will give origin to a random silicon network free of long poly-silane chains.