Zinc oxide as an ozone sensor
- Citation:
- Martins, R.a, Fortunato Nunes Ferreira Marques Bender Katsarakis Cimalla Kiriakidis E. a P. a. "Zinc oxide as an ozone sensor." Journal of Applied Physics. 96 (2004): 1398-1408.
Abstract:
A study of intrinsic zinc oxide thin film as ozone sensor based on the ultraviolet (UV) photoreduction and subsequent ozone re oxidation of zinc oxide as a fully reversible process was presented. It was found that the film described were produced by spray pyrolysis, dc and rf magnetron sputtering. The dc resistivity of the films changed more than eight orders of magnitude when exposed to an UV dose of 4 mW/cm2. Analysis shows that the porous and textured zinc oxide films produced by spray pyrolysis at low substrate exhibit an excellent ac impedance response.
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