Structure and composition of doped silicon oxycarbide microcrystalline layers produced by spatial separation techniques
- Citation:
- Martins, R., Vieira Ferreira Fortunato M. I. E. "Structure and composition of doped silicon oxycarbide microcrystalline layers produced by spatial separation techniques." Materials Research Society Symposium - Proceedings. Vol. 358. 1995. 787-792.
Abstract:
This work presents experimental data concerning the role of the oxygen partial pressure used during the preparation process, on the structure, composition and optoelectronic properties of wide band gap doped microcrystalline silicon oxycarbide films produced by a TCDDC system [1].
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