Structural, optical and electrical properties of indium-molybdenum oxide thin films prepared by spray pyrolysis

Citation:
Parthiban, S.a, Elangovan Ramamurthi Goncalves Martins Fortunato E. b K. a. "Structural, optical and electrical properties of indium-molybdenum oxide thin films prepared by spray pyrolysis." Physica Status Solidi (A) Applications and Materials Science. 207 (2010): 1554-1557.

Abstract:

Molybdenum doped indium oxide (IO) thin films were deposited on the Coring F1737 glass substrates at 400 °C by spray pyrolysis technique. TheModoping was varied between 0 and 4 at.%. The films were characterized by their structural, electrical and optical properties. The films are confirmed to be cubic bixbyite In 2O 3 with a strongest orientation along (222) for 0.5 at.% Mo, which is shifted to (400) plane when the Mo doping is increased to ≥1.2 at.%. The films deposited with 0.5 at.% Mo showed high mobility of ̃90 cm 2/Vs, resistivity of ̃6.8×10 -4ωcm and carrier concentration of ̃1.01× 1020 cm -3 with >̃73% transmittance in the visible range between 500 and 800 nm. The transmittance is well extended into near infrared region.

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