Role of the thickness on the electrical and optical performances of undoped polycrystalline zinc oxide films used as UV detectors
- Citation:
- Pimentel, A.C., Gonçalves Marques Martins Fortunato A. A. R. "Role of the thickness on the electrical and optical performances of undoped polycrystalline zinc oxide films used as UV detectors." Journal of Non-Crystalline Solids. 352 (2006): 1448-1452.
Abstract:
In this paper we present the effect of thickness on the electrical and optical properties of intrinsic/nondoped zinc oxide thin films deposited at room temperature by radio frequency magnetron sputtering, able to be used as a semiconductor material on electronic devices, like for example ozone gas sensors and ultraviolet detectors. These films are polycrystalline with a c-axis preferential orientation parallel to the substrate. The films present a resistivity that varies from 5.0 × 104 Ω cm to 1.0 × 109 Ω cm with an optical visible transmittance of 85%. The sensor response exceeds more than five orders of magnitude when exposed to UV light recovering to the initial state in the presence of ozone. © 2006 Elsevier B.V. All rights reserved.
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