Properties of ZnO thin films deposited by spray pyrolysis and magnetron sputtering
- Citation:
- Nunes, P., Fortunato Martins E. R. "Properties of ZnO thin films deposited by spray pyrolysis and magnetron sputtering." Materials Research Society Symposium Proceedings. Vol. 685. 2001. 128-133.
Abstract:
In this work we present a study of the properties of ZnO thin films produced by spray pyrolysis and r.f. magnetron sputtering. Before the annealing treatment the properties of the films are very similar, which means that the films produced by both techniques could be used on optoelectronic devices. However spray pyrolysis is a more simple and cheap technique than sputtering, but with this last technique the thin films exhibit a higher uniformity. © 2001 Materials Research Society.
Notes:
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