Properties presented by ZnO thin films deposited by magnetron sputtering and spray pyrolysis
- Citation:
- Nunes, P., Fortunato Martins Vilarinho E. R. P. "Properties presented by ZnO thin films deposited by magnetron sputtering and spray pyrolysis." Key Engineering Materials. 230-232 (2002): 424-427.
Abstract:
The most common techniques used to produce ZnO thin films are the spray pyrolysis and the magnetron sputtering techniques, low and high cost processes respectively. The aim of this work is to compare the properties of the films produced by these two techniques. The predominant difference observed was on the morphological properties. The films produced by spray pyrolysis have a rougher surface than the ones obtained by sputtering. Also the effect of the thermal annealing treatment is much more prononnced for the ZnO thin films produced by spray pyrolysis. After heat treatment films exhibit similar electrical properties and their application to optoelectronic devices is demonstrated.
Notes:
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