Performances presented by large-area thin film position-sensitive detectors based on amorphous silicon

Performances presented by large-area thin film position-sensitive detectors based on amorphous silicon

Citation:: Fortunato, E., Lavareda Scares Martins G. F. R. "Performances presented by large-area thin film position-sensitive detectors based on amorphous silicon." Thin Solid Films. 272 (1996): 148-156.

Abstract:

This paper presents a low-cost technology for the realisation of large-area thin film position-sensitive detectors using the a-Si:H technology. The obtained results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems, such as: machine tool alignment and control; angle measuring; rotation monitoring; surface profiling; medical instrumentation; targeting; remote optical alignment; guidance systems; etc., to which automated inspection control is needed.

Notes:

cited By 2

Rodrigo Martins

Professor @ Materials Science Department