Rodrigo Martins

Citation:

Barquinha, P., Martins Fortunato R. E. "N-type oxide semiconductor thin-film transistors." Springer Series in Materials Science. 156 (2012): 435-476.

Abstract:

This chapter gives an overview about GIZO TFTs, comprising an introductory section about generic TFT structure and operation, different semiconductor technologies for TFTs - with special emphasis on AOSs and particularly on GIZO - and then some experimental results obtained for GIZO TFTs fabricated in CENIMAT. Thin-film transistors (TFTs) are important electronic devices which are predominantly used as On/Off switches in active matrix backplanes of flat panel displays (FPDs), namely liquid crystal displays (LCDs) and organic light emitting device (OLED) displays. Even if a-Si:H is still dominating the TFT market in terms of semiconductor technology, oxide semiconductors are emerging as one of the most promising alternatives for the next generation of TFTs, bringing the possibility of having fully transparent devices, low processing temperature, low cost, high performance and electrically stable properties [1, 2]. Amorphous oxide semiconductors (AOS) such as Gallium-Indium-Zinc oxide (GIZO) [3, 4], even if fabricated at temperatures below 150°, are currently capable of providing transistors with field-effect mobility (μFE) exceeding 20 cm2V-1 s-1, threshold voltage (VT) close to 0V, On/Off ratios above 108, subthreshold swing (S) around 0:20V dec-1 and fully recoverable VT shift (ΔVT) lower than 0.5V after 24 h stress with constant drain current of 10 μA. © Springer-Verlag Berlin Heidelberg 2012.

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