Rodrigo Martins

Citation:

Martins, R., Dias Guimarães A. G. L. "The interpretation of the electric and optical properties of a-Si:H films produced by rf glow discharge through dark conductivity, photoconductivity and pulse controlled capacitance-voltage measurements." Journal of Non-Crystalline Solids. 57 (1983): 9-22.

Abstract:

This paper deals with the interpretation of transport properties of amorphous silicon hydrogenated films (a-Si:H) through dark conductivity, photoconductivity and pulse controlled capacitance-voltage measurements. a-Si:H films were produced by rf glow discharge coupled either inductively or capacitively to a 3% SiH4/Ar mixture at different crossed electromagnetic static fields. The data concerned with the dark activation energy, photoactivation energy, variation of the density of localized states and photosensitivity, (σph/σd)25°C, of a-Si:H films can account for their optoelectronic properties which are strongly dependent on the deposition parameters. We also observed that crossed electromagnetic static fields applied during film formation influences hydrogen incorporation in a different manner than previously proposed. © 1983.

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