From intelligent materials to smart sensors: a-Si:H position sensitive detectors

Citation:
Fortunato, E., Fernandes Soares Lavareda Martins M. F. G. "From intelligent materials to smart sensors: a-Si:H position sensitive detectors." Materials Research Society Symposium - Proceedings. Vol. 420. 1996. 165-170.

Abstract:

This work presents the main static and dynamic performances showed by one dimensional thin film position sensitive detectors (1D TFPSD), based on a-Si:H technology, with a size of 80 mm × 5 mm. The results obtained show that the TFPSD is able to respond to light powers as low as 2μ W/cm2, presenting a detection accuracy, linearity and response frequency better than 10 μm, 2% and 2 KHz, respectively. These results are quite promising regarding the application of these sensors to a wide variety of optical inspection systems where continuous quality control is required.

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