Influence of the deposition conditions on the gas sensitivity of zinc oxide thin films deposited by spray pyrolysis
- Citation:
- Nunes, P., Fortunato Lopes Martins E. A. R. "Influence of the deposition conditions on the gas sensitivity of zinc oxide thin films deposited by spray pyrolysis." International Journal of Inorganic Materials. 3 (2001): 1129-1131.
Abstract:
In this work we present preliminary results on the sensitivity to methane gas of zinc oxide thin films deposited by spray pyrolysis. It was found that using highly resistive (above 104 Ω cm) thin films and by performing the measurements at 200°C a sensitivity better than one order of magnitude was found to detect 2000 ppm of methane. A linear dependence on the sensitivity between 100 and 2000 ppm of methane was also obtained. © 2001 Elsevier Science Ltd. All rights reserved.
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