Gallium zinc oxide coated polymeric substrates for optoelectronic applications

Citation:
Fortunato, E., Gonçalves Marques Assunção Ferreira Águas Pereira Martins A. A. V. "Gallium zinc oxide coated polymeric substrates for optoelectronic applications." Materials Research Society Symposium - Proceedings. Vol. 769. 2003. 291-296.

Abstract:

Highly transparent and conductive ZnO:Ga thin films were produced by rf magnetron sputtering at room temperature on polyethylene naphthalate substrates. The films present a good electrical and optical stability, surface uniformity and a very good adhesion to the polymeric substrates. The lowest resistivity obtained was 5×10-4 Ωcm with a sheet resistance of 15 Ω/sqr and an average optical transmittance in the visible part of the spectra of 80%. It was also shown that by passivating the polymeric surface with a thin SiO2 layer, the electrical and structural properties of the films are improved nearly by a factor of 2.

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