Flexible large area thin film position sensitive detectors
- Citation:
- Fortunato, E., Ferreira Giuliani Martins I. F. R. "Flexible large area thin film position sensitive detectors." Sensors and Actuators, A: Physical. 86 (2000): 182-186.
Abstract:
Large area thin film position sensitive detectors based on amorphous silicon technology have been prepared on polyimide substrates using the conventional plasma-enhanced chemical vapour deposition. The sensors have been characterized by spectral response, light intensity dependence and linearity measurements in a bent state in order to evaluate the properties in real working conditions. The obtained one-dimensional (1D) position sensors with 10 mm width and 20 mm length present a non-linearity of ±1% which are comparable to the ones produced on glass substrates.
Notes:
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