Dependence of the strains and residual mechanical stresses on the performances presented by a-Si:H thin film position sensors
- Citation:
- Fortunato, E.a, Brida Pereira Águas Silva Ferreira Costa Teixeira Martins D. a L. a. "Dependence of the strains and residual mechanical stresses on the performances presented by a-Si:H thin film position sensors." Advanced Engineering Materials. 4 (2002): 612-616.
Abstract:
The influence of residual stresses on the performances of large area position sensitive detectors produced on flexible substrates are presented here. For evaluating the residual stresses, two main techniques were used: An active optical triangulation and angle resolved scattering and the constant photocurrent method (CPM). From the results it was possible to correlate the stresses and the density of defects present in the films.
Notes:
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