Cubic to hexagonal phase transition in spray deposited tin-doped indium oxide films
- Citation:
- Malik, A., Nunes Martins R. R. "Cubic to hexagonal phase transition in spray deposited tin-doped indium oxide films." Materials Research Society Symposium - Proceedings. Vol. 481. 1998. 599-605.
Abstract:
This work's aim is to report for the first time the cubic to hexagonal phase transition in tin-doped In2O3 films with a Sn/In atomic ratio of 0.03, fabricated at low temperature and normal pressure from alcoholic solution of InCl3 and SnCl4. The performed X-ray diffraction measurements show a difference between crystallographic symmetry of thin (100 nm) and thick (400 nm) films prepared in the same conditions: the structure of thick films can be related to high pressure In2O3 hexagonal system with a preferred orientation of c-axis parallel to the substrate surface, while thin films present a cubic symmetry with columnar (400) grain orientation. Phase transition nature is connected with non-axial tensile deformation of indium oxide grid due to insertion of chlorine ions in the position of two diagonally opposite oxygen vacancies in In2O3 network.
Notes:
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