Application of thin film technology to optical sensors
- Citation:
- Fortunato, E.a, Lavareda Vieira Martins Ferreira G. a M. a. "Application of thin film technology to optical sensors." Vacuum. 45 (1994): 1151-1154.
Abstract:
In this paper we present results of PIN single and dual axis Thin Film Position Sensitive Detectors (TFPSD) based on hydrogenated amorphous silicon (a-Si:H) technology, with a wide detection area (up to 80 × 80 mm). These sensors provide an alternative to Charge Coupled Devices (CCDs) when large inspection areas are needed, under a requirement to use simpler technology. In this paper we analyse the forward and reverse I-V characteristics in the dark and under illumination, as well as the device linearity of TFPSD. © 1994.
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