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A compact cesium ion source with a Wien filter is described. This source has been developed in order to produce a pure beam of cesium ions for positive SIMS analysis. The ions are produced by a surface ionization ion emitter. The initial beam is about 99% pure and the remaining 1% is removed via the Wien filter. An asymmetric einzel lens at the end provides the focusing of the beam on the target. A short description of the source is presented as well as the measured final beam characteristics.
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