{Polymorphous silicon films produced in large area reactors by PECVD at 27.12 MHz and 13.56 MHz}
Citation:
Aguas, H, Raniero, L, and Pereira. "{Polymorphous silicon films produced in large area reactors by PECVD at 27.12 MHz and 13.56 MHz}." 762 (2003): 589-594.
