@article {Aguas2003b,
	title = {{Polymorphous silicon films produced in large area reactors by PECVD at 27.12 MHz and 13.56 MHz}},
	volume = {762},
	year = {2003},
	note = {n/a},
	pages = {589{\textendash}594},
	abstract = {n/a},
	url = {http://apps.isiknowledge.com/full\_record.do?product=UA\&search\_mode=GeneralSearch\&qid=11\&SID=Z1nIo6NpO6CoGE2nDij\&page=3\&doc=123},
	author = {Aguas and H and Raniero and L and Pereira}
}
