Performances of an in-line PECVD system used to produce amorphous and nanocrystalline silicon solar cells

Citation:
Martins, N., P. Canhola, M. Quintela, I. Ferreira, L. Raniero, E. Fortunato, and R. Martins. "Performances of an in-line PECVD system used to produce amorphous and nanocrystalline silicon solar cells." Thin solid films. 511 (2006): 238-242.

Abstract:

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