Engineering of plasma deposition systems used for producing large area a-Si: H devices
- Citation:
- Martins, R., I. Ferreira, N. Carvalho, and L. Guimarães. "Engineering of plasma deposition systems used for producing large area a-Si: H devices." Journal of non-crystalline solids. 137 (1991): 757-760.
Abstract:
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Notes:
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