@article {5613,
	title = {Performances of an in-line PECVD system used to produce amorphous and nanocrystalline silicon solar cells},
	journal = {Thin solid films},
	volume = {511},
	year = {2006},
	note = {n/a},
	pages = {238-242},
	publisher = {Elsevier},
	abstract = {n/a},
	isbn = {0040-6090},
	author = {N. Martins and Canhola, P. and Quintela, M and Ferreira, I. and Raniero, L. and Fortunato, E. and Martins, R.}
}
