%0 Journal Article %J Thin solid films %D 2006 %T Performances of an in-line PECVD system used to produce amorphous and nanocrystalline silicon solar cells %A N. Martins %A Canhola, P. %A Quintela, M %A Ferreira, I. %A Raniero, L. %A Fortunato, E. %A Martins, R. %I Elsevier %P 238-242 %V 511 %X n/a %Z n/a %@ 0040-6090