The influence of deposition parameters on the growth of a-SiGe: H alloys in a plasma CVD system
- Citation:
- Zeman, M., I. Ferreira, MJ Geerts, and JW Metselaar. "The influence of deposition parameters on the growth of a-SiGe: H alloys in a plasma CVD system." Applied Surface Science. 46.1 (1990): 245-248.
Abstract:
n/a
Notes:
n/a