%0 Journal Article %J Applied Surface Science %D 1990 %T The influence of deposition parameters on the growth of a-SiGe: H alloys in a plasma CVD system %A Zeman, M. %A Ferreira, I. %A Geerts, MJ %A Metselaar, JW %I Elsevier %N 1 %P 245-248 %V 46 %X n/a %Z n/a %@ 0169-4332