@article {5538,
	title = {The influence of deposition parameters on the growth of a-SiGe: H alloys in a plasma CVD system},
	journal = {Applied Surface Science},
	volume = {46},
	year = {1990},
	note = {n/a},
	pages = {245-248},
	publisher = {Elsevier},
	abstract = {n/a},
	isbn = {0169-4332},
	author = {Zeman, M. and Ferreira, I. and Geerts, MJ and Metselaar, JW}
}
