Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques

Citation:
Ferreira, I., E. Fortunato, P. Vilarinho, A. S. Viana, A. R. Ramos, E. Alves, and R. Martins. "Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques." Journal of non-crystalline solids. 352.9 (2006): 1361-1366.

Abstract:

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