%0 Journal Article %J Journal of non-crystalline solids %D 2006 %T Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques %A Ferreira, I. %A Fortunato, E. %A Vilarinho, P. %A Viana, A. S. %A Ramos, A.R. %A E. Alves %A Martins, R. %I Elsevier %N 9 %P 1361-1366 %V 352 %X n/a %Z n/a %@ 0022-3093