@article {5505,
	title = {Hydrogenated silicon carbon nitride films obtained by HWCVD, PA-HWCVD and PECVD techniques},
	journal = {Journal of non-crystalline solids},
	volume = {352},
	year = {2006},
	note = {n/a},
	pages = {1361-1366},
	publisher = {Elsevier},
	abstract = {n/a},
	isbn = {0022-3093},
	author = {Ferreira, I. and Fortunato, E. and Vilarinho, P. and Viana, A. S. and Ramos, A.R. and E. Alves and Martins, R.}
}
