%0 Journal Article %J Journal of non-crystalline solids %D 1991 %T Engineering of plasma deposition systems used for producing large area a-Si: H devices %A Martins, R. %A Ferreira, I. %A Carvalho, N %A GuimarĂ£es, L %I North-Holland %P 757-760 %V 137 %X n/a %Z n/a %@ 0022-3093