@article {5667,
	title = {Engineering of plasma deposition systems used for producing large area a-Si: H devices},
	journal = {Journal of non-crystalline solids},
	volume = {137},
	year = {1991},
	note = {n/a},
	pages = {757-760},
	publisher = {North-Holland},
	abstract = {n/a},
	isbn = {0022-3093},
	author = {Martins, R. and Ferreira, I. and Carvalho, N and Guimar{\~a}es, L}
}
