Fortunate, E., Gonçalves De Carvalho Pimentel Lavareda Marques Martins A. C. N. "
Enhancement of the electrical properties of ITO deposited on polymeric substrates by using a ZnO buffer layer."
Materials Research Society Symposium Proceedings. Vol. 814. 2004. 231-236.
AbstractIn this paper we present the effect of the insertion of a non-doped nanocrystalline zinc oxide/buffer layer on the electrical, optical and structural properties of indium tin oxide produced at room temperature by radio frequency plasma enhanced reactive thermal evaporation on polymeric substrates. The electrical resistivity of the ITO films is reduced by more than two orders of magnitude (4.5×10-1 to 2.9×10-3 Ωcm). From the Hall effect measurements it is observed that the large decrease associated to the electrical resistivity, is due to the increase associated to the Hall mobility. Concerning the optical properties no effect was observed, being the transmittance in the visible and near the infra red region always higher than 80%.
Fortunate, E., Assunção Marques Ferreira Águas Pereira Martins V. A. I. "
Characterization of transparent and conductive ZnO:Ga thin films produced by rf sputtering at room temperature."
Materials Research Society Symposium - Proceedings. Vol. 763. 2003. 225-230.
AbstractGallium-doped zinc oxide films were prepared by rf magnetron sputtering at room temperature as a function of the substrate-target distance. The best results were obtained for a distance of 10 cm, where a resistivity as low as 2.7×10-4 Ωcm, a Hall mobility of 18 cm2/Vs and a carrier concentration of 1.3×1021 cm-3 were achieved. The films are polycrystalline presenting a strong crystallographic c-axis orientation (002) perpendicular to the substrate. The films present an overall transmittance in the visible part of the spectra of about 85 %, in average. The low resistivity, accomplished with a high growth rate deposited at RT, enables the deposition of these films onto polymeric substrates for flexible applications.
Fortunate, E.a, Ferreira Giuliani Wurmsdobler Martins I. a F. a. "
New ultra-light flexible large area thin film position sensitive detector based on amorphous silicon."
Journal of Non-Crystalline Solids. 266-269 B (2000): 1213-1217.
AbstractIn this paper we report on large area one dimensional (1D) amorphous silicon position sensors deposited on flexible polymer foil substrate. The pin sensor structure was deposited by rf plasma enhanced chemical vapour deposition (PECVD). For the electrical and optical characterisation the sensors have been mounted on a convex holder with a 14-mm radius-of-curvature, since the main goal of this work is to develop a flexible position sensor to be incorporated in a micromotor in order to measure its angular velocity continuously. The obtained sensors present adequate performances concerning the position non-linearity (±1% in 20 mm length), comparable to those fabricated on glass substrates. © 2000 Elsevier Science B.V. All rights reserved.
Fortunato, E.a, Nunes Marques Costa Águas Ferreira Costa Martins P. a A. a. "
Zinc oxide thin films deposited by rf magnetron sputtering on mylar substrates at room temperature."
Materials Research Society Symposium Proceedings. Vol. 685. 2001. 140-145.
AbstractAluminium doped zinc oxide thin films (ZnO:Al) have been deposited on polyester (Mylar type D, 100 μm thickness) substrates at room temperature by r.f. magnetron sputtering. The structural, morphological, optical and electrical properties of the deposited films have been studied. The samples are polycrystalline with a hexagonal wurtzite structure and a strong crystallographic c-axis orientation (002) perpendicular to the substrate surface. The ZnO:Al thin films with 85% transmittance in the visible and infra-red region and a resistivity as low as 3.6×102 Ωcm have been obtained, as deposited. The obtained results are comparable to those ones obtained on glass substrates, opening a new field of low cost, light weight, small volume, flexible and unbreakable large area optoelectronic devices. © 2001 Materials Research Society.
Fortunato, E., Barquinha Pereira Gonçalves Martins P. L. G. "
Multicomponent wide band gap oxide semiconductors for thin film transistors."
Proceedings of International Meeting on Information Display. Vol. 2006. 2006. 605-608.
AbstractThe recent application of wide band gap oxide semiconductors to transparent thin film transistors (TTFTs) is making a fast and growing (r)evolution on the contemporary solid-state electronics. In this paper we present some of the recent results we have obtained using wide band gap oxide semiconductors, like indium zinc oxide, produced by rf sputtering at room temperature. The devices work in the enhancement mode and exhibit excellent saturation drain currents. On-off ratios above 106 are achieved. The optical transmittance data in the visible range reveals average transmittance higher than 80%, including the glass substrate. Channel mobilities are also quite respectable, with some devices presenting values around 25 cm2/Vs, even without any annealing or other post deposition improvement processes. The high performances presented by these TTFTs associated to a high electron mobility, at least two orders of magnitude higher than that of conventional amorphous silicon TFTs and a low threshold voltage, opens new doors for applications in flexible, wearable, disposable portable electronics as well as battery-powered applications.
Fortunato, E., Barquinha Pimentel Gonçalves Pereira Marques Martins P. A. A. "
Next generation of thin film transistors based on zinc oxide."
Materials Research Society Symposium Proceedings. Vol. 811. 2004. 347-352.
AbstractWe report high performance ZnO thin film transistor (ZnO-TFT) fabricated by rf magnetron sputtering at room temperature with a bottom gate configuration. The ZnO-TFT operates in the enhancement mode with a threshold voltage of 19 V, a field effect mobility of 28 cm2/Vs, a gate voltage swing of 1.39 V/decade and an on/off ratio of 3×105. The ZnO-TFT present an average optical transmission (including the glass substrate) of 80% in the visible part of the spectrum. The combination of transparency, high field-effect mobility and room temperature processing makes the ZnO-TFT a very promising low cost optoelectronic device for the next generation of invisible and flexible electronics.
Fortunato, E., Malik Martins A. R. "
Thin oxide interface layers in a-Si:H MIS structures."
Journal of Non-Crystalline Solids. 227-230 (1998): 1230-1234.
AbstractPd-metal/insulator/semiconductor based on hydrogenated amorphous silicon were produced by plasma enhanced chemical vapour deposition with two different oxidised surfaces: thermal in ambient air and chemical with hydrogen peroxide. The diode characteristics have been investigated using dark and light current as f(v) measurements in the temperature range from 300 K to 380 K, from which it was possible to infer the electron barrier height. The data obtained show that the incorporation of a thin insulator layer between the semiconductor and the metal improves the performances of the devices by preventing the formation of suicides at the interface. Apart from that we also show that the MIS structures with the thermal oxide presents 'better' performances than the ones with the chemical oxide due to the type of interface states and of the oxide charges associated with the interface between the insulator and the semiconductor. © 1998 Elsevier Science B.V. All rights reserved.
Fortunato, E.a, Pereira Barquinha Botelho Do Rego Gongalves Vilà Morante Martins L. a P. a. "
High mobility indium free amorphous oxide based thin film transistors."
Proceedings of International Meeting on Information Display. Vol. 8. 2008. 1199-1202.
AbstractHigh mobility bottom gate thin film transistors (TFTs) with an amorphous gallium tin zinc oxide (a-GSZO) channel layer have been produced by rf magnetron cosputtering using a gallium zinc oxide (GZO) and tin (Sn) targets. The effect of the post annealing temperatures (200 °C, 250 °C and 300 °C) was evaluated and compared with two series of TFTs produced at room temperature and 150 °C during the channel deposition. From the results it was observed that the effect ofpos annealing is crucial for both series of TFTs either for stability as well as for improving the electrical characteristics. The a-GSZO TFTs operate in the enhancement mode (n-type), present a high saturation mobility of 24.6 cm2/Vs, a subthreshold gate swing voltage of 0.38 V/decade, a turn-on voltage of -0.5 V, a threshold voltage of 4.6 V and an ION/IOFF ratio of 8x107, satisfying all the requirements to be used in active-matrix backplane.