{Silicon carbide alloys produced by hot wire, hot wire plasma-assisted and plasma-enhanced CVD techniques} | Luís Miguel Nunes Pereira

{Silicon carbide alloys produced by hot wire, hot wire plasma-assisted and plasma-enhanced CVD techniques}

Citation:: Ferreira, I., M. E. V. Costa, L. Pereira, E. Fortunato, R. Martins, A. R. Ramos, and M. F. Silva. "{Silicon carbide alloys produced by hot wire, hot wire plasma-assisted and plasma-enhanced CVD techniques}." Applied Surface Science. 184 (2001): 8-19.

Abstract:

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