{Role of substrate on the growth process of polycrystalline silicon thin films by low-pressure chemical vapour deposition}
- Citation:
- Pereira, L, Aguas, H, and Raniero. "{Role of substrate on the growth process of polycrystalline silicon thin films by low-pressure chemical vapour deposition}." 455-456 (2004): 112-115.
Abstract:
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Notes:
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