{Influence of the deposition conditions on the properties of titanium oxide produced by r.f. magnetron sputtering}
Citation:
Barquinha, P., L. Pereira, H. Águas, E. Fortunato, and R. Martins. "{Influence of the deposition conditions on the properties of titanium oxide produced by r.f. magnetron sputtering}." Materials Science in Semiconductor Processing. 7 (2004): 243-247.