{Influence of the deposition conditions on the properties of titanium oxide produced by r.f. magnetron sputtering}

Citation:
Barquinha, P., L. Pereira, H. Águas, E. Fortunato, and R. Martins. "{Influence of the deposition conditions on the properties of titanium oxide produced by r.f. magnetron sputtering}." Materials Science in Semiconductor Processing. 7 (2004): 243-247.

Abstract:

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Notes:

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