Luís Miguel Nunes Pereira

DCM - Departamento de Ciência dos Materiais

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{Batch processing method to deposit a-Si : H films by PECVD}

Citation:
Raniero, L, Aguas, H, and Pereira. "{Batch processing method to deposit a-Si : H films by PECVD}." 455-456 (2004): 104-107.
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