Role of oxygen partial pressure on the properties of doped silicon oxycarbide microcrystalline layers produced by spatial separation techniques

Citation:
Martins, R., M. Vieira, I. Ferreira, and E. Fortunato. "Role of oxygen partial pressure on the properties of doped silicon oxycarbide microcrystalline layers produced by spatial separation techniques." Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 13.4 (1995): 2199-2209.

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