@article {5511,
	title = {Role of oxygen partial pressure on the properties of doped silicon oxycarbide microcrystalline layers produced by spatial separation techniques},
	journal = {Journal of Vacuum Science \& Technology A: Vacuum, Surfaces, and Films},
	volume = {13},
	year = {1995},
	note = {n/a},
	pages = {2199-2209},
	publisher = {AVS},
	abstract = {n/a},
	isbn = {0734-2101},
	author = {Martins, R. and Vieira, M and Ferreira, I. and Fortunato, E.}
}
