Nanostructured silicon films produced by PECVD

Citation:
Martins, R., H. Aguas, V. Silva, I. Ferreira, A. Cabrita, and E. Fortunato. "Nanostructured silicon films produced by PECVD." MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS. 664 (2001): A9. 6-A9. 6.

Abstract:

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Notes:

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